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INSPECTION & METROLOGY
Short Wave Infrared Microscope
Mid Wave Infrared for Defect Detection and Analysis
Small Format Standard and Right Angle Viewing Microscope
PRODUCTS
Products >> AST-M150T Benchtop Infrared
Uses: Inspection, Metrology
AST-M150T
Mid Wave Benchtop Infrared
Microscope for
Defect Detection and Analysis
The AST-M150T is a Mid Wave Benchtop Infrared Microscope for defect detection and analysis. It is a universal configuration for a multitude of applications. Powerful software is included.
Download PDF Specification Sheet >>
• Meant as an aid to find defects either visually or thermo graphically with the MWIR band (3-5 microns).
• Thermo graphic microscope to find thermally identifiable defects.
• Applications for aerospace, medical device, semiconductor and forensic, materials and processes development and analysis.
• Magnifications from Macro to 1x, 2.5x, 4x, and 5x.
• Precision 150mm travel manual coarse and fine precision stage for accurate navigation and metrology.
• Stage has 6mm cross-roller, lead-screw/stepper motor construction and can accommodate heavy loads (up to approximately 25 kilos)
• Precision Z axis 250mm travel manual column for sample and tooling compatibility.
• Thermal detection to 20 mK.
• Spatial resolution below 10 microns.
• 640 x 512, 20 micron pixel InSp FPA on a closed cycle dewar (no LN2 required).
• Turn key system.
• System includes various image analysis and enhancement features.
Options:
• Motorized (& CNC) X & Y Axis.
• Motorized (& CNC) Z Axis.
• 0.1 or 0.5 µm Linear Encoders for X, Y, and Z Axes.
• Laptop or Industrial Computer Interface.
• 200mm, 300mm and Custom Stages.
• Automated and Custom Stages.
• Wafer Loaders.
• Illumination Packages.
Description
Features & Specs